Studying femtosecond-laser hyperdoping by controlling surface morphology
نویسندگان
چکیده
منابع مشابه
Femtosecond laser hyperdoping and micro/nanotexturing of silicon for photovoltaics
We have developed a technique, optical hyperdoping, for doping semiconductors to unusually high levels and endowing them with remarkable optoelectronic properties. By irradiating silicon (Si) with a train of femtosecond laser pulses in the presence of heavy chalcogen (sulfur, selenium, and tellurium) compounds, a 100-300 nm thin layer of Si is doped to nonequilibrium levels (~1 at. %). Hyperdop...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2012
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.4709752